Post by scia Systems GmbH
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AMTC has purchased a new cluster system from scia Systems, with strategic support from Tekscend Photomask Corp.. The scia Cluster 215 comprises two processing chambers: ☑️ the scia Mill system is equipped with a broad ion beam source supporting both Ion Beam Etching (#IBE) and Reactive or Chemically Assisted Ion Beam Etching (#RIBE / #CAIBE) ☑️ the scia Trim system uses a focused broad ion beam with a fine focal point for highly precise trimming of substrates More Information here: https://lnkd.in/dKMUMDKE © Picture: Advanced Mask Technology Center