Post by scia Systems GmbH
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NEW PUBLICATION NOW AVAILABLE Advances in augmented and mixed reality (#AR / #MR) depend on the performance of optical nanostructures, particularly surface relief gratings (SRGs) as optical in- and out-couplers in waveguides. The Institut für Mikroelektronik Stuttgart (IMS CHIPS) published a new #paper addressing the nanopatterning capabilities of slanted and blazed SRGs in terms of – sidewall angle, – modulation of pitch and critical dimension, – continuous depth variation and shape fidelity control Special thanks to the co-authors from our team, Mandy Göring and Andrea Schulze. The publication is available on IOPscience: https://lnkd.in/dsG9KgxP The work will also be presented at #SPIEPhotonicsEurope by IMS. #Photonics #AR #VR #Nanofabrication #NanoimprintLithography #Optics #Microelectronics #sciasystems