Post by ETEL S.A.
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In semiconductor manufacturing, speed only matters if you hit the target every time. Traditional motion systems are limited by stiffness and structural resonances. HEXAMAG removes the mechanical barriers limiting dynamic performance. Because the stage levitates magnetically, high control bandwidth overcomes traditional mechanical limitations. The result: ✔ Up to 2 m/s speed ✔ Up to 20 m/s² acceleration ✔ >150 Hz bandwidth ✔ Move-and-settle: 50 mm within ±30 nm in <160 ms For OEMs, this means: — Higher throughput — Better overlay performance — Faster settling — Lower TCO With HEXAMAG, precision is no longer at the cost of throughput. ➡ Read in the next chapter: How HEXAMAG closes the metrology loop where is truly matters ⬅️ previous chapter: Freedom of motion #HEXAMAG #ControlBandwidth #MoveAndSettle #SemiconductorEquipment #PrecisionMotion #AdvancedPackaging #SemiconductorOEM #NanometePositioning
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