Post by Entegris

Understanding mean particle size and large particle counts (LPCs) is essential to maintaining CMP slurry performance. Mean abrasive size drives material removal rate, while LPCs directly affect yield. Our recent webinar explores how dynamic light scattering (DLS) and single particle optical sizing (SPOS) provide the clarity needed to monitor slurry health with confidence. Watch the webinar and learn about: • DLS and SPOS fundamentals • Mean size vs. LPC measurement strategies • Lab and online testing best practices • How to interpret data effectively • How Entegris supports more precise slurry health monitoring Watch the on demand webinar and deepen your CMP metrology expertise. https://lnkd.in/eURY_qHt #CMP #Metrology #ParticleAnalysis #Monitoring