Post by Entegris

Entegris is proud to participate as a Silver Sponsor at ALD/ALE 2026, the premier international conference focused on atomic scale deposition and etching technologies. Our researchers will present peer reviewed technical work addressing key challenges in advanced ALD, including precursor chemistry, oxidation pathways, safety, and conformality in high aspect ratio structures: 📍An oral presentation by Rong Zhao, on HfCl₄ based ALD using alternate oxidizers to enable improved growth and conformality 📍A poster presentation by David Ermert, Ph.D. on novel indium precursor chemistries designed for safer, more scalable ALD processes 👉 Learn more about Entegris’ technical contributions at ALD/ALE 2026 on our event page: https://lnkd.in/ejR6k-Yx #ALDALE2026 #ALD #ALE #AtomicLayerDeposition #SemiconductorResearch #MaterialsScience