Post by ASML

At Mistral AI's AI Now Summit in Paris, France, Arnaud Hubaux, Head of AI Program and Strategy at ASML, shared how AI innovations are enhancing our product portfolio and engineering practices. Here are five operational AI use cases across our systems and workflows: 🔬 R&D: AI enables our teams to explore more design alternatives for extremely complex parts by guiding decisions in high-dimensional engineering spaces. More than 12,000 designs have been explored so far. 🔍 Computational lithography: AI is accelerating time-to-solution and improving optical proximity correction recipe quality and accuracy. In January 2026, we completed early validation of our first GenAI capability with a customer. 💡 EUV source: AI helps optimize and calibrate EUV source settings to enable faster, more robust system initialization. Early tests delivered increased wafer-level power gain in EUV scanners at a customer. 🔎 E-beam inspection: AI is increasing throughput and tool effectiveness by enabling faster issue detection while maintaining rigorous accuracy and reliability. 🩺 Customer diagnostics: AI extracts root causes from unstructured data, accelerating diagnosis and corrective action. AI-driven root cause analysis can diagnose certain sub-system errors more than 70% faster, while matching our engineers’ accuracy in our first pilot. By applying AI across our products and engineering practices, we help our teams work more efficiently while strengthening the performance and reliability of our systems.