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At ASML, innovation doesn’t always mean smaller nodes. Sometimes it means smarter use of proven technology. The PAS 5500 is a time-tested platform that remains a trusted choice for many More-than-Moore applications, including MEMS miniaturization, supporting compound semiconductors for modern power electronics and enabling mass production for diverse photonics applications. This platform does it with the required precision, all while delivering sustainable value for our customers. 🔧 Since we no longer make these systems new, we work closely with our customers to buy back, refurbish and reinstall them globally. 🏭 Every time we refurbish a PAS 5500 system, it saves about 429 tons of carbon dioxide compared to building a new one. 🔁 Through our refurbishment program, we’ve given over 500 systems from the field a second life. Together with our customers and partners, we’re shaping a future where mature ASML lithography solutions support sustainable manufacturing for cutting-edge technology.

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