Data Science | Machine Learning internship: dose control algorithms

Introduction

The Dose Control team at ASML in Veldhoven develops advanced control methods that enable accurate and stable dose delivery in extreme ultraviolet (EUV) lithography systems. These systems are essential for manufacturing the world’s most advanced semiconductor chips. In this Data Science | Machine Learning internship: dose control algorithms, you support improvements that help systems perform reliably in the field. Your work will directly contribute to better accuracy, stability, and robustness of dose delivery. This internship combines physics insight with modern data-driven methods.

Your assignment

In this Data Science | Machine Learning internship: dose control algorithms, you work with complex data from scanner subsystems, sensors, and process feedback loops. You explore how machine learning and AI methods can enhance dose control accuracy, stability, and availability. As system behavior becomes more complex and stochastic, data-driven approaches become increasingly important. Your main responsibilities will be

• Analyze large, multi-source datasets from lithography system feedback and sensors
• Develop and evaluate data-driven models that support improved dose control strategies
• Combine physical insight with machine learning methods to improve robustness and predictability
• Test and validate algorithms using realistic system data and scenarios
• Translate analysis outcomes into clear recommendations for control improvements
• Collaborate with engineers from different technical backgrounds
• Document results clearly and present findings to the team

This is a bachelor/master apprentice internship for minimum 4 months, 5 days per week (3/4 days on-site).

The start date of this internship is as of September 2026 and is flexible.

Your profile

To be suitable for the internship, you:

• Are enrolled in a bachelor’s or master’s degree
• Study data science, machine learning, applied mathematics, physics, or a closely related field
• Have solid experience in Python and experience in Machine Learning and/or Artificial Intelligence is a must have
• Show an analytical and structured approach to complex technical problems
• Communicate clearly and collaboratively in English, both written and spoken

This Data Science | Machine Learning internship: dose control algorithms offers you the opportunity to build strong technical foundations in control theory, data-driven modeling, and physical system behavior. You will gain hands-on experience in an international, innovative environment where your ideas matter. During this internship, you grow both technically and professionally while contributing to technology that shapes the future of computing.

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R.

• 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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