Dresden, Saxony, Germany
Specialties: Microelectronics, Power Semiconductor Devices, IGBT, Metallization, Interconnects, Atomic Layer Deposition, ALD, Advanced Materials, Materials Analysis Methods, Analytics, R&D, Project Management, Industrial Research and Development, Public Funded Research and Development Projects
Technology Development for IGBTs
Working fields: - Metallization systems for microelectronic devices - Atomic Layer Deposition (ALD) of metal thin films, especially copper - Metal-organic chemical vapor deposition (MOCVD) of copper - Materials analysis and characterization methods (SEM, FIB, EDX, Spectroscopic Ellipsometry) Further fields of interest: - High-frequency devices - Integrated optics - Photonic crystals - Advanced materials
Group Leader Nanomaterials and Analytics
Working fields: - Metallization systems for microelectronic devices - Metal-organic chemical vapor deposition (MOCVD) of copper - Atomic Layer Deposition (ALD) of metal thin films, especially copper - Materials analysis methods Further fields of interest: - High-frequency devices - Integrated optics - Photonic crystals - Advanced materials
Contributing to the work of Michael J. Manfra and Nils G. Weimann on the field of GaN-based HEMTs