Tiia Tervamäki

Process Engineer | Advanced Packaging & Hybrid Bonding | Surface & Interface Processes | Semiconductor R&D

Innsbruck, Tyrol, Austria

About

Process Engineer with 5+ years of experience in semiconductor R&D and cleanroom manufacturing, working at the intersection of advanced packaging, hybrid bonding, and submicron metrology. In my current role at Besi Austria, I drive metrology activities across hybrid bonding development, including equipment ownership, process optimization, and roadmap definition. I support die-to-wafer fusion and hybrid bonding process development through surface and interface characterization, enabling data-driven improvements in bonding performance and yield. My work spans tool selection, installation, troubleshooting, and cross-functional collaboration with suppliers, customers, and research partners. I have contributed to multiple EU-funded projects (HiConnects, E2PackMan) and act as technical lead for HyPact from the Besi side, collaborating with international partners on next-generation hybrid bonding technologies. My background combines hands-on cleanroom processing, metrology strategy, and process development, with a growing focus on process integration and wet and chemical processing in semiconductor fabrication. I am particularly interested in international semiconductor R&D environments and opportunities to grow toward process integration roles. Key areas: hybrid bonding (DtW), submicron metrology, cleanroom processing, process development, surface/interface characterization, cross-functional collaboration

Experience

  • Process Specialist at Besi Austria GmbH
    Jan 2024 - Present · 2 yrs 6 mos

    Process Specialist – Advanced Packaging & Hybrid Bonding Metrology At Besi Austria, I work at the interface of process development, metrology, and equipment engineering within hybrid and thermocompression bonding technologies. I am responsible for defining and driving the metrology roadmap for hybrid bonding, supporting process development and integration through surface and interface characterization, equipment strategy, and data-driven analysis. My role combines hands-on work with coordination across process, equipment, and supplier interfaces to enable robust and scalable bonding processes. Key responsibilities Drive hybrid bonding metrology strategy and roadmap, aligning characterization capabilities with process development and integration needs Support die-to-wafer hybrid and fusion bonding process development through surface/interface analysis and data-driven optimization Own and develop metrology infrastructure (SEM/EDX/FIB, CSAM, AFM, IR, 3D microscopy, reflectometry), including assessment, selection, and ramp-up of new equipment Act as technical lead in EU-funded R&D projects (e.g. HyPact), coordinating activities with international partners (imec, Fraunhofer) Collaborate with suppliers and internal teams to troubleshoot and optimize equipment and processes Analyze and manage metrology data (Python, ImageJ), linking process conditions to performance and yield Interface with customers in technical discussions, demonstrations, and material evaluations

  • Career Transition / Professional Development (2022–2023) at No-company. (Self-employed.)
    Jan 2022 - Dec 2023 · 2 yrs

    During this period, I focused on transitioning within the semiconductor industry toward advanced packaging and hybrid bonding technologies. I deepened my technical focus on surface and interface processes while gaining broader insight into the European semiconductor landscape and international industry environments. In parallel, I undertook short-term project work in applied technical settings and spent time across Europe, including extended stays in Finland and Germany. This period supported my transition toward an international career path and included intensive German language development (B2 certified, with advanced coursework completed).

  • Process Engineer at AMETEK
    Jan 2019 - Dec 2021 · 3 yrs

    Process Engineer – X-ray Detector Technologies At Ametek Finland, I worked on semiconductor-based X-ray detector technologies, contributing across process development, cleanroom fabrication, and production ramp-up in an international R&D and manufacturing environment. My role covered the full lifecycle from wafer-level processing to final device characterization, supporting the transition from development to production and ensuring process reliability and quality. Key contributions Executed full cleanroom fabrication lifecycle (surface preparation, processing, testing), ensuring process stability and reproducibility Established X-ray detector testing infrastructure and sample preparation workflows, enabling new characterization capabilities across R&D and production Supported transition from development to production through SOP implementation and alignment with ERP and ISO-compliant processes Performed high-precision metrology and data analysis to validate process performance and product quality Supervised wire bonding operations and ensured quality compliance in production environment Led acquisition and implementation of radiation sources; appointed Radiation Safety Officer and developed safety framework Gained hands-on experience in electrochemical processing (e.g. electro-etching), supporting understanding of surface modification and process control

  • Master thesis Researcher at Aalto University
    Feb 2018 - Aug 2018 · 7 mos

    Master’s Thesis Researcher – Microfabrication & Microfluidics Aalto University (Micronova Cleanroom) in collaboration with Perkin Elmer Conducted experimental research on inertial microfluidic devices for size-based cell separation, developing and validating a proof-of-concept system within a cleanroom environment. The work involved microfabrication, device design, and experimental validation of flow-based separation mechanisms, addressing a technically challenging and multidisciplinary problem at the intersection of fluid dynamics, materials, and microfabrication. Key contributions Designed and fabricated microfluidic devices using cleanroom processes (SU-8 lithography, PDMS integration) Developed experimental setups and performed validation of cell separation performance Implemented automated image analysis workflows (ImageJ), improving data processing efficiency and reproducibility Analyzed experimental data and correlated device performance with process and design parameters Delivered technical reporting and thesis documentation on a complex, multidisciplinary research topic

  • Laboratory Teaching Assistant – Chemistry Education at Aalto University Luma Centre
    Sep 2017 - Jan 2018 · 5 mos

    Supported delivery of hands-on laboratory sessions in chemistry, guiding student groups through experiments and ensuring safe and structured execution. Responsible for preparation of experiments, scheduling, and maintaining laboratory safety standards, while communicating scientific concepts in an accessible and engaging way.