Chelmsford, Massachusetts, United States
I have worked for close to 40 years as an R&D engineer in both process and equipment development for semiconductor manufacturing. I’m a fast learner and an effective contributor in previously unfamiliar technical areas such as optical imaging, vacuum processes, focused ion beam, and electrochemical deposition. I have an extensive record of consistent capability in: Successful root cause analysis of difficult process and equipment problems Generating and investigating ideas for product innovation Finding solutions for complex logistical problems with technical component Error budget creation based on experimental data Customer communication aspect of troubleshooting (have been described as a calming influence) Working cross-functionally within a company and with corporate partners Effective learning of relevant cutting-edge technological innovations In the area of process equipment, I have been able to isolate key factors limiting a tool’s performance and devise ways of overcoming those limitations. Examples include overlay of a step and repeat lithography tool, the edge placement accuracy of a focused ion beam mask repair tool, and particle control in PVD and electroplating tools. In the area of process itself, much of my present job involves working with customers, either on site or remotely, to contain and resolve critical process issues. With this work I have an aptitude for and take enjoyment in customer communications.
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R&D in new tool and process capabilities in anticipation of customer needs. Support technical visibility for ASM NEXX through conference presence and joint development projects. Guide technical strategy for new features and for issues with customer processes.
Performed customer demos and process development for both electroplating and sputter deposition tools. Developed analytical methods and models to quantify and improve critical aspects of product performance, such as uniformity and particle control. Ran product qualifications prior to shipment and performed troubleshooting in factory and at customer sites in US, Europe and Asia.
Evaluated and maintained compatibility of subsystem designs with overall system performance requirements in a focused ion beam photomask repair tool. Analyzed and performed troubleshooting of elusive system-level performance issues. Created error budgets and specifications of new features on existing mask repair tools, and system-level specifications on new products.
Conducted ongoing detailed analysis of reduction stepper system performance and subsystem interactions. Created and modified test procedures as required. Developed overlay and focus models for current systems using MATLAB, and used them to generate error budgets and subsystem specifications for new system. Provided technical leadership and carried out administrative duties covering mechanical, optical and systems engineering.