Chemnitz, Saxony, Germany
The scia Systems GmbH manufactures advanced ion beam and plasma processing equipment, for the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as in research and development environments. scia Systems provides highly reliable tools together with a superior technology support. The process systems address the entire spectrum in ion beam technology and are available with special source arrangements on platforms that accommodate all standard wafer sizes. The tools are flexible and modular in design. Several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements. Technology Portfolio - Ion Beam Etching and Milling (IBE/IBM) - Ion Beam Trimming (IBT) - Physical Vapor Deposition (PVD) - Dual Ion Beam Deposition (DIBD) - Reactive Ion Etching (RIE) - Plasma Enhanced Chemical Vapor Deposition (PECVD) - Plasma Cleaning
Sales Director for the American and Japanese Markets. Responsible for plasma and ion beam processing equipment and technolgies.
Research and development in the area of - ion beam processing - ion beam trimming (of BAW/SAW filter) - ion beam figuring of high precision optics - ion beam etching - plasma etching