Eindhoven, North Brabant, Netherlands
Design & developmen of EUV illumination system, including Low NA and High NA optics.
DUV imaging competence leader
Design and development of DUV projection optics and advanced optical manipulators
Design, development and marketing of ultra-precise industrial metrology tools for the Semiconductors and Optics industry.
Feasibility and tests of an advanced in-line metrology tool for ultra-precise single-point diamont turning and polishing tools (Precitech NanoForm, Zeeko).
Industrial Optics group. Research & Development of industrial metrology systems for the Semiconductor Industry (up to the proto level), incl. design, development (Opto-mechatronics, DAQ, SW) and validation.