San Francisco Bay Area
Accomplished engineer with in-depth knowledge of both vacuum-based and wet-chemical based process experience. Proven ability to move out of the comfort zone and embrace new concepts and technology to take on advanced new customer projects. Able to distill and filter out the essential and relevant requirements from complex assignments. Skilled at applying combinatorial screening methodology to drive accelerated development with reduced resource requirements. Experienced in managing resources to keep projects on target and on budget. Demonstrated ability to design experiments, analyze data and extract key variables. Excellent skills at making and giving presentations to illustrate key concepts and provide guidance. Demonstrated essential communication skills in managing customers and anticipating their needs. High caliber problem solver in troubleshooting process and tool issues. Extensive background in PECVD/ALD and wet-chemical cleaning processes. Excellent problem solver using novel and unique ideas with many patent filings.
Responsible for project and technical management of all wet chemistry related customer activities. Led initial technical discussion to specify requirements and define the scope of work. Planned and executed demos to prove capability of IMI’s platform. Defined project schedule and allocated resources. Analyzed data and communicated progress and results to customer. Managed customer discussion and expectations as project progressed. Managed the development and CIP of all IMI wet tools, from identifying CIP items to release of CIP product. Defined the product specification and testing methodology to successfully evaluate new HW/SW components. Managed on-site upgrade schedule and customer training. Independently developed unit process for ALD/PVD thin film deposition to define process window and meet specification. Projects & Accomplishments: • Managed over 7 projects and brought them to successful completion with high customer satisfaction, resulting in 3 customers returning for additional collaboration. • Projects included EUV mask clean, post-CMP clean, electroless deposition, immersion lens clean, HDIS, pattern collapse, ALD precursor evaluation, and superconducting computing. • Two highly successful chemistry formulations became the new POR immediately after fab evaluation. • Successfully demonstrated F-30 tool capability which resulted in tool sale to TSMC. Completed F-30 signoff and training of local engineers. • F-30 product management resulted in 2 generations of CIP upgrades that improved tool capability, uptime, and lowered cost.
Responsible for the process development of high density plasma SPEED gapfill process. Managed all development and demo efforts among different groups as owner of process chamber. Designed and executed marathon runs to troubleshoot and prove process stability. Documented process response and marathon result for product release. Owner of several development demos which involved planning, executing, and updating customers. Visited customer to understand needs and supported sales in developing tool positioning sales strategies. Led escalation to identify root cause and provide solution. Projects & Accomplishments as Process Engineer: • Developed and released BKMs for Nanofill gapfill process, FSG and PSG. • Designed and tested process sequence for new products. Such as Automatic Temperature Control, enabling wafer temperature control and repeatable dopant level. Projects & Accomplishments as Key Account Technologist: • Supported various customers onsite, including AMD Dresden, ST Agrate, Infineon, TI, UMC, Spansion, SMIC… • Provided process qualification on new tool installations, resulting in tool signoff at AMD Dresden, and TI. • Executed demo development for ST Agrate resulting in extension of tool lifetime.