Almuñécar, Andalusia, Spain
Optics system development of Laser Direct Imaging lithographic tool. Developed calibration method for mega mirror spatial light modulator. Designed and built phase-shifting point diffraction interferometer and phase unwrapping. Developed numerical analysis methods for Shack-Hartmann sensors. Developed optical specifications for several lithographic tools and opto-mechanical specifications for several spatial light modulators. Mathematical formalism and algorithms for system analysis. Extensive modelling experience of diverse systems including deformable mirrors, coherence control and shaping, thermal deformation in non-isotropic materials.