Leuven, Flemish Region, Belgium
FEoL Integration CMOS finfet 7nm
Device centering and performance improvement to fulfill customer requirements. CMOS 28nm technology integration in a high volume 300mm foundry. - Leading-edge technology development through device performance analysis and step-up - FEOL & BEOL process changes designed, planned & qualified through PCRB - 8 Products ramped-up and sustained
Metal Gate process development to enable CMOS 28nm BULK and FDSOI technologies Time shared between ST 300mm Fab and CEA-LETI research center - PVD deposition process and metrology development for 28nm technology (3 patents) - Specific MOS structures designed & run on silicon - MOS Electrical Characterization and IPE testbench setup - 2 papers published in Microelectronic Engineering (vol. 88, 2011) - 4 international conferences
- Technological watch on metal gate additives and physical mechanism - Follow-up of PVD deposition tool startup & qualification - Metrology calibration (XPS, XRF, Ellipsometry, Rs)
- Optical profilometer testbench setup. - Measurement of micrometric particles on curved interfaces
- PVD deposition of nanometric layers for gas sensor applications - Automation of a FTIR spectrometer